Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9394609 | Atomic layer deposition of aluminum fluoride thin films | Mikko Ritala, Markku Leskelä | 2016-07-19 |
| 9382615 | Vapor deposition of LiF thin films | Jani Hamalainen, Mikko Ritala, Markku Leskelä | 2016-07-05 |