Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425062 | Method for improving CD micro-loading in photomask plasma etching | Xiaoyi Chen, Amitabh Sabharwal, Ajay Kumar | 2016-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425062 | Method for improving CD micro-loading in photomask plasma etching | Xiaoyi Chen, Amitabh Sabharwal, Ajay Kumar | 2016-08-23 |