Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425062 | Method for improving CD micro-loading in photomask plasma etching | Zhigang Mao, Amitabh Sabharwal, Ajay Kumar | 2016-08-23 |
XC
Xiaoyi Chen
Overall (2016): #182,740 of 481,213Top 40%
1
Patents 2016