Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425062 | Method for improving CD micro-loading in photomask plasma etching | Zhigang Mao, Xiaoyi Chen, Ajay Kumar | 2016-08-23 |
AS
Amitabh Sabharwal
Overall (2016): #469,867 of 481,213Top 100%
1
Patents 2016