Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |