Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |