Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484409 | Semiconductor devices including channel dopant layer | Eun-Sun Lee, Junhwa Song, Ji Hun Kim | 2016-11-01 |
| 9452505 | Textured membrane for a multi-chamber carrier head | Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |