Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452505 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Andrew J. Nagengast, Thomas Brezoczky | 2016-09-27 |
| 9368371 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2016-06-14 |
| 9352441 | Chemical mechanical polisher with hub arms mounted | Chih-Hung Chen, Jay Gurusamy | 2016-05-31 |