Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080767 | Thermal processing apparatus and thermal processing method for object to be processed | Kenichi Yamaga | 2011-12-20 |
| 8055372 | Processing system, processing method, and computer program | Yuki KATAOKA, Tatsuya Yamaguchi, Yuichi Takenaga | 2011-11-08 |
| 7953512 | Substrate processing system, control method for substrate processing apparatus and program stored on medium | Yuichi Takenaga, Tatsuya Yamaguchi, Toshihiko Takahashi, Masato Yonezawa | 2011-05-31 |
| 7896649 | Heat system, heat method, and program | Noriaki Koyama | 2011-03-01 |
| 7869888 | Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium | Noriaki Koyama, Minoru Obata | 2011-01-11 |