Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082054 | Method of optimizing process recipe of substrate processing system | Kaname Yamaji, Kiyoshi Suzuki | 2011-12-20 |
| 8055372 | Processing system, processing method, and computer program | Yuki KATAOKA, Tatsuya Yamaguchi, Wenling Wang | 2011-11-08 |
| 7953512 | Substrate processing system, control method for substrate processing apparatus and program stored on medium | Tatsuya Yamaguchi, Wenling Wang, Toshihiko Takahashi, Masato Yonezawa | 2011-05-31 |