Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055391 | Server device and program | Masashi Takahashi, Noriaki Koyama | 2011-11-08 |
| 7974729 | Server device and program with sub-recipe measurement communication | Masashi Takahashi, Noriaki Koyama | 2011-07-05 |
| 7869888 | Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium | Noriaki Koyama, Wenling Wang | 2011-01-11 |