Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8055391 | Server device and program | Masashi Takahashi, Minoru Obata | 2011-11-08 |
| 7974729 | Server device and program with sub-recipe measurement communication | Masashi Takahashi, Minoru Obata | 2011-07-05 |
| 7896649 | Heat system, heat method, and program | Wenling Wang | 2011-03-01 |
| 7869888 | Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium | Minoru Obata, Wenling Wang | 2011-01-11 |