Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052887 | Substrate processing apparatus | Tamaki Yuasa | 2011-11-08 |
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kotaro Miyatani, Kohei Kawamura, Takaaki Matsuoka | 2011-09-20 |
| 7940009 | Plasma processing apparatus | Kiyotaka Ishibashi | 2011-05-10 |
| 7930992 | Plasma processing equipment | Kiyotaka Ishibashi | 2011-04-26 |
| 7895971 | Microwave plasma processing apparatus | Caizhong Tian | 2011-03-01 |
| 7874781 | Substrate processing apparatus | Takaaki Matsuoka | 2011-01-25 |