Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kotaro Miyatani, Toshihisa Nozawa, Takaaki Matsuoka | 2011-09-20 |
| 8017197 | Plasma processing method and plasma processing apparatus | Yasuo Kobayashi | 2011-09-13 |
| 7923819 | Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same | Tadahiro Ohmi, Seiji Yasuda, Atsutoshi Inokuchi, Takaaki Matsuoka | 2011-04-12 |
| 7897205 | Film forming method and film forming apparatus | Takatoshi Kameshima, Yasuo Kobayashi | 2011-03-01 |