Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021975 | Plasma processing method for forming a film and an electronic component manufactured by the method | Kotaro Miyatani, Kohei Kawamura, Toshihisa Nozawa | 2011-09-20 |
| 7923819 | Interlayer insulating film, wiring structure and electronic device and methods of manufacturing the same | Tadahiro Ohmi, Seiji Yasuda, Atsutoshi Inokuchi, Kohei Kawamura | 2011-04-12 |
| 7874781 | Substrate processing apparatus | Toshihisa Nozawa | 2011-01-25 |