Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017197 | Plasma processing method and plasma processing apparatus | Kohei Kawamura | 2011-09-13 |
| 7897205 | Film forming method and film forming apparatus | Takatoshi Kameshima, Kohei Kawamura | 2011-03-01 |