Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069704 | Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure | Yoshiharu Kishida | 2011-12-06 |
| 7940009 | Plasma processing apparatus | Toshihisa Nozawa | 2011-05-10 |
| 7930992 | Plasma processing equipment | Toshihisa Nozawa | 2011-04-26 |