Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069704 | Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure | Kiyotaka Ishibashi | 2011-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069704 | Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure | Kiyotaka Ishibashi | 2011-12-06 |