Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080765 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuya Oda, Hiroaki Inadomi | 2011-12-20 |
| 8025925 | Heating apparatus, coating and development apparatus, and heating method | Takahiro Kitano, Nobuaki Matsuoka | 2011-09-27 |
| 7977609 | Temperature measuring device using oscillating frequency signals | Nobuyuki Sata, Takahiro Kitano, Toshiyuki Matsumoto, Tomohide Minami | 2011-07-12 |
| 7871265 | Heat treatment device | Takahiro Kitano, Kazuo Terada | 2011-01-18 |