NS

Nobuyuki Sata

TL Tokyo Electron Limited: 2 patents #132 of 712Top 20%
Overall (2011): #76,014 of 364,097Top 25%
2
Patents 2011

Issued Patents 2011

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Shuji Iwanaga 2011-09-06
7977609 Temperature measuring device using oscillating frequency signals Takahiro Kitano, Tetsuo Fukuoka, Toshiyuki Matsumoto, Tomohide Minami 2011-07-12