SI

Shuji Iwanaga

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #167,925 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8014895 Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereon Nobuyuki Sata 2011-09-06