Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080765 | Apparatus and method for heating substrate and coating and developing system | Tetsuo Fukuoka, Tetsuya Oda, Hiroaki Inadomi | 2011-12-20 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Yasushi Hayashida | 2011-06-07 |
| 7889428 | External laser light introducing device | — | 2011-02-15 |
| 7880859 | Substrate processing system and substrate processing method | Yasushi Hayashida, Yoshitaka Hara | 2011-02-01 |
| 7871211 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Yasushi Hayashida | 2011-01-18 |
| 7864666 | Communication control apparatus, method and program thereof | Tooru ENOKI, Yasuo Inoue | 2011-01-04 |