Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8057114 | Wet-processing apparatus, wet-processing method and storage medium | Yoshitaka Hara | 2011-11-15 |
| 8025023 | Coating and developing system, coating and developing method and storage medium | Yoshitaka Hara | 2011-09-27 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Shinichi Hayashi | 2011-06-07 |
| 7880859 | Substrate processing system and substrate processing method | Shinichi Hayashi, Yoshitaka Hara | 2011-02-01 |
| 7871211 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2011-01-18 |