Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038769 | Liquid processing apparatus, liquid processing method and storage medium | — | 2011-10-18 |
| 8025925 | Heating apparatus, coating and development apparatus, and heating method | Tetsuo Fukuoka, Takahiro Kitano | 2011-09-27 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Yasushi Hayashida, Shinichi Hayashi | 2011-06-07 |
| 7952627 | Solid-state image capturing apparatus and electric information device | Hidenori Morimoto | 2011-05-31 |
| 7914613 | Liquid processing apparatus, liquid processing method and storage medium | — | 2011-03-29 |
| 7871211 | Coating and developing system, coating and developing method and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2011-01-18 |