Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040504 | Defect inspecting method and defect inspecting apparatus | Misako Saito, Kaoru Fujiwara | 2011-10-18 |
| 8021623 | Examination method and examination assistant device for quartz product of semiconductor processing apparatus | Masayuki Oikawa, Katsuhiko Anbai, Nobuhiro Takahashi | 2011-09-20 |
| 8008211 | Pattern forming method, semiconductor device manufacturing apparatus and storage medium | Akitake Tamura, Kaoru Fujihara | 2011-08-30 |
| 7993458 | Vacuum processing apparatus and method | Masaki Kondo, Misako Saito | 2011-08-09 |
| 7946152 | Apparatus and method for measuring the concentration of organic gas | Misako Saito | 2011-05-24 |
| 7923680 | Analysis method and analysis apparatus | Kazuya Dobashi, Shigeru Kawamura, Kohei Tsugita | 2011-04-12 |