Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021623 | Examination method and examination assistant device for quartz product of semiconductor processing apparatus | Masayuki Oikawa, Katsuhiko Anbai, Teruyuki Hayashi | 2011-09-20 |