Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040504 | Defect inspecting method and defect inspecting apparatus | Teruyuki Hayashi, Kaoru Fujiwara | 2011-10-18 |
| 7993458 | Vacuum processing apparatus and method | Masaki Kondo, Teruyuki Hayashi | 2011-08-09 |
| 7946152 | Apparatus and method for measuring the concentration of organic gas | Teruyuki Hayashi | 2011-05-24 |