Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041525 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system | Yoshihiro Kondo, Kunie Ogata | 2011-10-18 |
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Masahide Tadokoro, Tsuyoshi Shibata | 2011-07-26 |
| 7968825 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Kunie Ogata | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Masahide Tadokoro, Megumi Jyousaka, Yoshitaka Konishi, Kunie Ogata | 2011-06-07 |
| 7897896 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Kunie Ogata | 2011-03-01 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Masahide Tadokoro, Kunie Ogata, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |