Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867673 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Kunie Ogata, Hiroshi Tomita, Michio Tanaka | 2011-01-11 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Masahide Tadokoro, Kunie Ogata, Hiroshi Tomita | 2011-01-11 |
| 7862966 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Kunie Ogata, Hiroshi Tomita, Michio Tanaka | 2011-01-04 |