Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Tsuyoshi Shibata, Shinichi Shinozuka | 2011-07-26 |
| 7968260 | Substrate processing method, computer-readable storage medium, and substrate processing system | Kunie Ogata | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Megumi Jyousaka, Yoshitaka Konishi, Shinichi Shinozuka, Kunie Ogata | 2011-06-07 |
| 7910863 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Hiroshi Tomita | 2011-03-22 |
| 7902485 | Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereon | Megumi Jyousaka, Hiroshi Tomita | 2011-03-08 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Kunie Ogata, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |