Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041525 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system | Yoshihiro Kondo, Shinichi Shinozuka | 2011-10-18 |
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Masahide Tadokoro, Tsuyoshi Shibata, Shinichi Shinozuka | 2011-07-26 |
| 7968260 | Substrate processing method, computer-readable storage medium, and substrate processing system | Masahide Tadokoro | 2011-06-28 |
| 7968825 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Shinichi Shinozuka | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Masahide Tadokoro, Megumi Jyousaka, Yoshitaka Konishi, Shinichi Shinozuka | 2011-06-07 |
| 7897896 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Shinichi Shinozuka | 2011-03-01 |
| 7884950 | Substrate processing method, program, computer-readable storage medium, and substrate processing system | Heiko Weichert, Tsuyoshi Shibata | 2011-02-08 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Masahide Tadokoro, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |
| 7867673 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Hiroshi Tomita, Michio Tanaka, Ryoichi Uemura | 2011-01-11 |
| 7862966 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Hiroshi Tomita, Michio Tanaka, Ryoichi Uemura | 2011-01-04 |