Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083961 | Method and system for controlling the uniformity of a ballistic electron beam by RF modulation | Ping Jiang | 2011-12-27 |
| 8038834 | Method and system for controlling radical distribution | Merritt Funk, David V. Horak, Eric J. Strang | 2011-10-18 |
| 7998307 | Electron beam enhanced surface wave plasma source | Paul Moroz | 2011-08-16 |
| 7993937 | DC and RF hybrid processing system | Merritt Funk | 2011-08-09 |
| 7988813 | Dynamic control of process chemistry for improved within-substrate process uniformity | Radha Sundararajan, Merritt Funk | 2011-08-02 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundararajan | 2011-05-10 |
| 7938081 | Radial line slot antenna having a conductive layer | Paul Moroz | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Merritt Funk, Daniel Prager, Radha Sundararajan | 2011-03-01 |
| 7875555 | Method for plasma processing over wide pressure range | Merritt Funk | 2011-01-25 |
| 7875859 | Ion energy analyzer and methods of manufacturing and operating | Lin Xu, Ronald Victor Bravenec | 2011-01-25 |