Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8083961 | Method and system for controlling the uniformity of a ballistic electron beam by RF modulation | Lee Chen | 2011-12-27 |
| 8008200 | Poison-free and low ULK damage integration scheme for damascene interconnects | William W. Dostalik, Yong-Seok Choi | 2011-08-30 |
| 7943499 | FUSI integration method using SOG as a sacrificial planarization layer | Jiong-Ping Lu, Yaw S. Obeng, Joe G. Tran | 2011-05-17 |
| 7884019 | Poison-free and low ULK damage integration scheme for damascene interconnects | William W. Dostalik, Yong-Seok Choi | 2011-02-08 |