Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998865 | Systems and methods for removing wafer edge residue and debris using a residue remover mechanism | Brian K. Kirkpatrick, Alfred Griffin | 2011-08-16 |
| 7943499 | FUSI integration method using SOG as a sacrificial planarization layer | Jiong-Ping Lu, Yaw S. Obeng, Ping Jiang | 2011-05-17 |