Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998865 | Systems and methods for removing wafer edge residue and debris using a residue remover mechanism | Joe G. Tran, Brian K. Kirkpatrick | 2011-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998865 | Systems and methods for removing wafer edge residue and debris using a residue remover mechanism | Joe G. Tran, Brian K. Kirkpatrick | 2011-08-16 |