Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8073667 | System and method for using first-principles simulation to control a semiconductor manufacturing process | Andrej Mitrovic | 2011-12-06 |
| 8050900 | System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process | Andrej Mitrovic | 2011-11-01 |
| 8038834 | Method and system for controlling radical distribution | Merritt Funk, David V. Horak, Lee Chen | 2011-10-18 |
| 8036869 | System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model | Andrej Mitrovic | 2011-10-11 |
| 8032348 | System and method for using first-principles simulation to facilitate a semiconductor manufacturing process | Andrej Mitrovic | 2011-10-04 |
| 8014991 | System and method for using first-principles simulation to characterize a semiconductor manufacturing process | Andrej Mitrovic | 2011-09-06 |