Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8038834 | Method and system for controlling radical distribution | David V. Horak, Eric J. Strang, Lee Chen | 2011-10-18 |
| 8019458 | Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures | Radha Sundararajan, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-09-13 |
| 7993937 | DC and RF hybrid processing system | Lee Chen | 2011-08-09 |
| 7988813 | Dynamic control of process chemistry for improved within-substrate process uniformity | Lee Chen, Radha Sundararajan | 2011-08-02 |
| 7967995 | Multi-layer/multi-input/multi-output (MLMIMO) models and method for using | Radha Sundararajan, Hyung Joo Lee, Daniel Prager, Asao Yamashita | 2011-06-28 |
| 7939450 | Method and apparatus for spacer-optimization (S-O) | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-05-10 |
| 7899637 | Method and apparatus for creating a gate optimization evaluation library | Asao Yamashita, Daniel Prager, Lee Chen, Radha Sundararajan | 2011-03-01 |
| 7894927 | Using Multi-Layer/Multi-Input/Multi-Output (MLMIMO) models for metal-gate structures | Radha Sundararajan, Asao Yamashita, Daniel Prager, Hyung Joo Lee | 2011-02-22 |
| 7875555 | Method for plasma processing over wide pressure range | Lee Chen | 2011-01-25 |
| 7877161 | Method and system for performing a chemical oxide removal process | Masayuki Tomoyasu, Kevin Pinto, Masaya Odagiri, Lemuel Chen, Asao Yamashita +2 more | 2011-01-25 |