Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Kailash Kiran Patalay +4 more | 2011-07-12 |
| 7960256 | Use of CL2 and/or HCL during silicon epitaxial film formation | Zhiyuan Ye, Yihwan Kim, Ali Zojaji, Nicholas C. Dalida, Jinsong Tang +2 more | 2011-06-14 |