Issued Patents 2011
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059692 | Laser oscillator | Ryoji Nomura | 2011-11-15 |
| 8048754 | Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer | Fumito Isaka, Sho Kato, Takashi Hirose | 2011-11-01 |
| 8044372 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi, Aiko Shiga, Mai Akiba | 2011-10-25 |
| 8043935 | Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device | Fumito Isaka, Sho Kato, Yu Arita | 2011-10-25 |
| 8034724 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Fumito Isaka, Yasuhiro Jinbo, Junya Maruyama | 2011-10-11 |
| 8030177 | Method for manufacturing semiconductor devices using embrittled layers | Masaki Koyama, Yasuhiro Jinbo, Naoki OKUNO | 2011-10-04 |
| 8017508 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Yasuhiro Jinbo | 2011-09-13 |
| 8003483 | Method for manufacturing SOI substrate | Hideomi Suzawa, Shinya Sasagawa, Junpei Momo, Motomu Kurata, Taiga Muraoka +1 more | 2011-08-23 |
| 7994021 | Method of manufacturing semiconductor device | Hidekazu Miyairi, Hironobu Shoji, Eiji Higa, Tomoaki Moriwaka, Shunpei Yamazaki | 2011-08-09 |
| 7989316 | Method of manufacturing semiconductor device | Tatsuya Mizoi, Hidekazu Miyairi, Koichiro Tanaka | 2011-08-02 |
| 7985604 | Method of manufacturing photoelectric conversion device | Fumito Isaka, Sho Kato, Kosei Nei, Ryu Komatsu, Koji Dairiki | 2011-07-26 |
| 7943885 | Laser irradiation method and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Aiko Shiga, Atsuo Isobe | 2011-05-17 |
| 7943414 | Method for manufacturing SOI substrate | Hideto Ohnuma, Junpei Momo, Shunpei Yamazaki | 2011-05-17 |
| 7939426 | Manufacturing method of SOI substrate | Fumito Isaka, Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi | 2011-05-10 |
| 7932164 | Method for manufacturing semiconductor substrate by using monitor substrate to obtain optimal energy density for laser irradiation of single crystal semiconductor layers | Masaki Koyama, Motoki NAKASHIMA | 2011-04-26 |
| 7920611 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Tamae Takano, Masaki Koyama, Koichiro Tanaka | 2011-04-05 |
| 7897476 | Method of manufacturing SOI substrate | Shunpei Yamazaki, Eiji Higa, Yoji Nagano, Tatsuya Mizoi | 2011-03-01 |
| 7881350 | Laser apparatus, laser irradiation method, and manufacturing method of semiconductor device | Hidekazu Miyairi, Tamae Takano, Masaki Koyama | 2011-02-01 |
| 7867907 | Method for manufacturing semiconductor device | Hidekazu Miyairi, Yasuhiro Jinbo | 2011-01-11 |