Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8044372 | Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment | Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Mai Akiba | 2011-10-25 |
| 7943885 | Laser irradiation method and method of manufacturing semiconductor device | Koichiro Tanaka, Hidekazu Miyairi, Akihisa Shimomura, Atsuo Isobe | 2011-05-17 |
| 7892952 | Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Koichiro Tanaka, Mai Akiba | 2011-02-22 |