Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048754 | Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer | Akihisa Shimomura, Sho Kato, Takashi Hirose | 2011-11-01 |
| 8043935 | Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device | Sho Kato, Yu Arita, Akihisa Shimomura | 2011-10-25 |
| 8034724 | Method for manufacturing semiconductor device | Akihisa Shimomura, Hidekazu Miyairi, Yasuhiro Jinbo, Junya Maruyama | 2011-10-11 |
| 8017429 | Method for manufacturing photoelectric conversion device | Sho Kato, Junpei Momo | 2011-09-13 |
| 7985604 | Method of manufacturing photoelectric conversion device | Sho Kato, Kosei Nei, Ryu Komatsu, Akihisa Shimomura, Koji Dairiki | 2011-07-26 |
| 7951656 | Method for manufacturing semiconductor device | Sho Kato, Satoshi Toriumi, Hideto Ohnuma | 2011-05-31 |
| 7947523 | Method for manufacturing photoelectric conversion device | Sho Kato, Satoshi Toriumi | 2011-05-24 |
| 7939426 | Manufacturing method of SOI substrate | Sho Kato, Kosei Nei, Ryu Komatsu, Tatsuya Mizoi, Akihisa Shimomura | 2011-05-10 |