Issued Patents 2011
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058709 | Semiconductor device and manufacturing method thereof | — | 2011-11-15 |
| 7994023 | Manufacturing methods of SOI substrate and semiconductor device | — | 2011-08-09 |
| 7994021 | Method of manufacturing semiconductor device | Hidekazu Miyairi, Hironobu Shoji, Akihisa Shimomura, Eiji Higa, Shunpei Yamazaki | 2011-08-09 |
| 7978412 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | — | 2011-07-12 |
| 7972943 | Manufacturing method of semiconductor device | — | 2011-07-05 |
| 7953310 | Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device | Koichiro Tanaka | 2011-05-31 |
| 7947570 | Manufacturing method and manufacturing apparatus of semiconductor substrate | Takatsugu Omata, Hideto Ohnuma | 2011-05-24 |
| 7935584 | Method for manufacturing crystalline semiconductor device | Koichiro Tanaka | 2011-05-03 |
| 7927983 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Koichiro Tanaka | 2011-04-19 |
| 7879689 | Method of manufacturing a semiconductor device including a semiconductor substrate with stripes of different crystal plane directions | — | 2011-02-01 |