Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Peter Cirigliano, Dongho Heo, Daehan Choi, S. M. Reza Sadjadi | 2011-03-22 |
| 7902073 | Glue layer for hydrofluorocarbon etch | Ji Soo Kim, Deepak Gupta, S. M. Reza Sadjadi | 2011-03-08 |