Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Peter Cirigliano, Sangheon Lee, Dongho Heo, S. M. Reza Sadjadi | 2011-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Peter Cirigliano, Sangheon Lee, Dongho Heo, S. M. Reza Sadjadi | 2011-03-22 |