Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8080168 | Confinement ring drive | — | 2011-12-20 |
| 7910489 | Infinitely selective photoresist mask etch | Ji Soo Kim, Sangheon Lee, Dongho Heo, Daehan Choi, S. M. Reza Sadjadi | 2011-03-22 |