Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han +4 more | 2011-12-27 |