Issued Patents 2011
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084344 | Methods of fabricating a semiconductor device | Jong Won Lee, Sang-Yeob Han, Bo-Un Yoon, Jae-Dong Lee | 2011-12-27 |
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2011-12-27 |
| 8053845 | Semiconductor device including dummy gate part and method of fabricating the same | Byoung-ho Kwon, Sang-youn Jo, Jin-sook Choi, Bo-Un Yoon, Hong-Soo Kim +1 more | 2011-11-08 |
| 8048808 | Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same | Jong Won Lee, Sang-Yeob Han, Bo-Un Yoon, Jae-Dong Lee | 2011-11-01 |
| 8043970 | Slurry compositions for selectively polishing silicon nitride relative to silicon oxide, methods of polishing a silicon nitride layer and methods of manufacturing a semiconductor device using the same | Jong Won Lee, Sang-Yeob Han, Jae-Dong Lee | 2011-10-25 |
| 8038508 | Apparatus for polishing a wafer and method for detecting a polishing end point by the same | Jong-Heun Lim, Sung-Ho Shin, Bo-Un Yoon | 2011-10-18 |
| 8034705 | Method of forming a seam-free tungsten plug | Suk-Hun Choi, Yoon-Ho Son, Ju-Young Jung | 2011-10-11 |
| 8030150 | Method of fabricating non-volatile memory integrated circuit device and non-volatile memory integrated circuit device fabricated using the same | Byoung-ho Kwon, Bo-Un Yoon, Jun Yong Kim | 2011-10-04 |
| 8018078 | Photo key and method of fabricating semiconductor device using the photo key | Byoung-ho Kwon, Bo-Un Yoon, Jae-Dong Lee, Sang Jin Kim | 2011-09-13 |
| 8008172 | Methods of forming semiconductor devices including multistage planarization and crystalization of a semiconductor layer | Jong-Heun Lim, Bo-Un Yoon, Seong-Kyu Yun, Suk-Hun Choi, Sang-Yeob Han | 2011-08-30 |
| 7985999 | Semiconductor device having capacitor | Jung-Min Oh, Jeong-Nam Han, Woo-Gwan Shim, Im-Soo Park | 2011-07-26 |
| 7959738 | Method of removing photoresist and method of manufacturing a semiconductor device | Dae-Hyuk Kang, Hyo-San Lee, Dong-Gyun Han, Kun-Tack Lee | 2011-06-14 |
| 7932163 | Methods of forming stacked semiconductor devices with single-crystal semiconductor regions | Jong-Heun Lim, Bo-Un Yoon, Dae-Lok Bae, Seong-Kyu Yun, Suk-Hun Choi | 2011-04-26 |
| 7879735 | Cleaning solution for silicon surface and methods of fabricating semiconductor device using the same | Sang-Yong Kim, Woo-Gwan Shim | 2011-02-01 |
| 7867902 | Methods of forming a contact structure | Suk-Hun Choi, Hyun-Jun Sim, Yoon-Ho Son | 2011-01-11 |