Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jung-Min Oh +4 more | 2011-12-27 |
| 8058180 | Methods of fabricating a semiconductor device using a dilute aqueous solution of an ammonia and peroxide mixture | Doo Won Kwon, Hyung-Ho Ko, Chang-Sup Mun, Woo-Gwan Shim, Im-Soo Park +1 more | 2011-11-15 |
| 7985999 | Semiconductor device having capacitor | Jung-Min Oh, Chang-Ki Hong, Woo-Gwan Shim, Im-Soo Park | 2011-07-26 |