Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Chang-Ki Hong, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2011-12-27 |
| 7959738 | Method of removing photoresist and method of manufacturing a semiconductor device | Dae-Hyuk Kang, Dong-Gyun Han, Chang-Ki Hong, Kun-Tack Lee | 2011-06-14 |