Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053163 | Method of fine patterning semiconductor device | Shi-Yong Yi, Kyoung Taek Kim, Dong Ki Yoon | 2011-11-08 |
| 8042534 | Solar servo control tracking device | Kee Hyok Choi, In Cheol Lim, Hyeok Jae Woo, Kyoo Jae Shin | 2011-10-25 |
| 8039196 | Method of forming fine patterns using a block copolymer | Kyoung Taek Kim, Sang Ouk Kim, Shi-Yong Yi, Seong-woon Choi | 2011-10-18 |
| 7985529 | Mask patterns including gel layers for semiconductor device fabrication | Mitsuhiro Hata, Jung-hwan Hah, Sang-Gyun Woo | 2011-07-26 |
| 7932019 | Gettering members, methods of forming the same, and methods of performing immersion lithography using the same | Jin Young Yoon, Chan-Soo Hwang, Yun-Kyeong Jang | 2011-04-26 |